Products Categories
  • Mr.Andy Guo
    Tel: +86-21-62456266

  • Mobile:
  • Tel:+86-21-62456266
  • Fax:+86-21-62456266
  • URL:http://www.yuji-sifluo.com
  • Province/state:Shanghai
  • City:Shanghai
  • Street:Room 2105, No. 319, Xianxia Road, Changning District, Shanghai, 200051 China.
  • MaxCard:
Home > Products >  Hexafluoro-1,3-butadiene (C4F6); hexafluorobutadiene

Hexafluoro-1,3-butadiene (C4F6); hexafluorobutadiene CAS NO.685-63-2

  • Min.Order: 5 Kilogram
  • Payment Terms: L/C,T/T
  • Product Details

Keywords

  • Hexafluoro-1,3-butadiene
  • perfluorobutadiene
  • hexafluorobutadiene

Quick Details

  • ProName: Hexafluoro-1,3-butadiene (C4F6); hexaf...
  • CasNo: 685-63-2
  • Molecular Formula: C4F6
  • Appearance: Liquified Gas
  • Application: A new generation of semiconductor etch...
  • PackAge: 4.64L/10.2L/44L Cylinder
  • Port: Shenzhen
  • ProductionCapacity: 50 Metric Ton/Year
  • Purity: 99% min
  • Storage: Protect from sunlight. Store in a well...
  • LimitNum: 5 Kilogram
  • Grade: Industrial Grade,Electron Grade

Superiority

In fluorine chemical, Yuji Tech has been dedicated to R&D of production of ODS alternatives, fluoropolymers and fluorinated fine chemicals for years, and has become an international leading innovation enterprise in fluorine chemical research and production. Yuji Tech has undertaken the projects of Development and Industrialization of ODS Alternatives from Ministry of Environmental Protection and Development and Industrialization of ODS Alternatives from the Industry and Information Technology Department of Shaanxi Province. In 2014, the project Development and Application of the Manufacturing and Catalytic Technology of Zero ODP and Environmentally Friendly Fluorides by Yuji Tech won the second prize of Beijing Science and Technology Award. In 2016, Yuji Tech won the first prize of "Shaanxi Provincial Science and Technology Award". In 2017, Yuji Tech won the second prize of “State Science and Technology Invention Award”. At present, Yuji Tech has applied for 62 invention patents, of which 20 have been granted. Yuji Tech's main fluorine chemicals cover refrigerants, blowing agents, aerosol propellants, fire extinguishing agents, cleaning agents, electronic gases, Insulating gases, isocyanates, perfluoroalky iodides, fluorinated intermediates, fluoropolymers, etc.

Details

Hexafluoro-1,3-butadiene/C4F6

Hexafluoro-1,3-butadiene (C4F6) is an environmentally friendly dry etching gas with low GWP, high etching rate, high selectivity and high aspect ratio, showing very high performance for critical plasma etching in semiconductor devices manufacturing.

Product Description

Items

Specification

Chemical Name

Hexafluoro-1,3-butadiene, Perfluorobutadiene

Chemical formula

CF2=CF-CF=CF2

Molecular formula

C4F6

CAS NO.

685-63-2

Molecular weight (g/mol)

162.03

ODP

0

GWP100 yr

260

Atmospheric lifetime (days)

<1

 

Physical & Chemical Properties

Attributes

Values

Chemical Name

Hexafluoro-1,3-butadiene, Perfluorobutadiene

Boiling point (℃)

-6.5

Freezing point (℃)

-130

Critical temperature (℃)

139.6

Critical pressure (bar)

31.9

Liquid density (kg/l, @15℃)

1.44

Vapor density (kg/m3, @15℃)

6.8

Vapor pressure (bar, @25℃)

2.11

Heat of vaporization (kJ/kg,@b.p.)

161.8

Explosion limits (%vol)

7-73

 

Other products of this supplier

lookchemhot product CAS New CAS